VOC出口濃度註:N.A 設備維修中
TSMC_15P6_PC312.971  ppm
TSMC_15P6_PC323.199  ppm
TSMC_15P6_PC333.002  ppm
TSMC_15P6_PC343.432  ppm
TSMC_15P6_PC350.756  ppm
TSMC_15P6_PC361.305  ppm
TSMC_15P6_PC372.271  ppm
TSMC_15P6_PC382.063  ppm