VOC出口濃度註:N.A 設備維修中
TSMC_15P6_PC312.636  ppm
TSMC_15P6_PC323.419  ppm
TSMC_15P6_PC333.099  ppm
TSMC_15P6_PC342.638  ppm
TSMC_15P6_PC351.597  ppm
TSMC_15P6_PC361.522  ppm
TSMC_15P6_PC372.308  ppm
TSMC_15P6_PC381.908  ppm