VOC出口濃度註:N.A 設備維修中
TSMC_15P5_P3013.962  ppm
TSMC_15P5_P3024.277  ppm
TSMC_15P5_P3034.522  ppm
TSMC_15P5_P3044.560  ppm
TSMC_15P5_P3055.399  ppm
TSMC_15P5_P3064.750  ppm
TSMC_15P5_P3075.300  ppm
TSMC_15P5_P3083.948  ppm
TSMC_15P5_P3095.025  ppm