VOC出口濃度註:N.A 設備維修中
TSMC_15P5_P3012.186  ppm
TSMC_15P5_P3022.302  ppm
TSMC_15P5_P3031.705  ppm
TSMC_15P5_P3041.791  ppm
TSMC_15P5_P3052.888  ppm
TSMC_15P5_P3062.175  ppm
TSMC_15P5_P3071.177  ppm
TSMC_15P5_P3081.704  ppm
TSMC_15P5_P3091.544  ppm